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题名:
releasing control policy for semiconductor wafer fabrication based on fuzzy petri nets-reasoning
作者: Cao Zheng-Cai ; Zhao Hui-Dan ; Wang Yong-Ji
关键词: Fabrication ; Fuzzy systems ; Optimization ; Petri nets
刊名: Tien Tzu Hsueh Pao/Acta Electronica Sinica
发表日期: 2011
卷: 39, 期:7, 页:1545-1550
收录类别: EI
部门归属: (1) College of Information Science and Technology, Beijing University of Chemical Technology, Beijing 100029, China; (2) State Key Laboratory of Computer Science, Institute of Software, Chinese Acad. of Sci., Beijing 100080, China
英文摘要: Because of large amount of stochastic and uncertain factors in semiconductor wafer fabrication (SWF), we often meet with all kinds of disruptions which make the former optimal scheduling scheme lose superiority. Considering the advantage of the fuzzy Petri-net (FPN) on the knowledge expression and logical reasoning, a releasing control policy for SWF based on FPN is proposed. According to the releasing FPN -reasoning model and the real-time data collected from the line, the control method can help to take the feasible releasing action to adopted to different conditions. With the releasing strategy, the throughput of the wafer fabrication can be maximized and the system can be optimized to a large extent. Finally, the effectiveness of this proposed method is confirmed by simulation.
语种: 中文
内容类型: 期刊论文
URI标识: http://ir.iscas.ac.cn/handle/311060/13889
Appears in Collections:互联网软件技术实验室 _期刊论文

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基于模糊Petri网推理的半导体生产线投料控制策略.pdf(2182KB)----限制开放-- 联系获取全文

Recommended Citation:
Cao Zheng-Cai,Zhao Hui-Dan,Wang Yong-Ji. releasing control policy for semiconductor wafer fabrication based on fuzzy petri nets-reasoning[J]. Tien Tzu Hsueh Pao/Acta Electronica Sinica,2011-01-01,39(7):1545-1550.
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