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ANFIS and SA Based Approach to Prediction, Scheduling, and Performance Evaluation for Semiconductor Wafer Fabrication [期刊论文]
CHINESE JOURNAL OF ELECTRONICS, 2013-01-01, 卷号: 22, 期号: 1, 页码: 25-30
Cao Zhengcai; Zhao Huidan; Wang Yongji

 

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