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Source：chinese journal of chemical engineering
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bottleneck prediction method based on improved adaptive network-based fuzzy inference system (anfis) in semiconductor manufacturing system
[期刊论文]
Chinese Journal of Chemical Engineering, 2012-01-01, 卷号: 20, 期号: 6, 页码: 1081-1088
Cao Zhengcai
;
Deng Jijie
;
Liu Min
;
Wang Yongji
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