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releasing control policy for semiconductor wafer fabrication based on fuzzy petri nets-reasoning [期刊论文]
Tien Tzu Hsueh Pao/Acta Electronica Sinica, 2011-01-01, 卷号: 39, 期号: 7, 页码: 1545-1550
Cao Zheng-Cai; Zhao Hui-Dan; Wang Yong-Ji
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