a drum-buffer-rope based scheduling method for semiconductor manufacturing system

ISCAS OpenIR

	a drum-buffer-rope based scheduling method for semiconductor manufacturing system
	Cao Zhengcai; Peng Yazhen; Wang Yongji
	2011
会议名称	2011 7th IEEE International Conference on Automation Science and Engineering, CASE 2011
会议录名称	IEEE International Conference on Automation Science and Engineering
页码	120-125
会议日期	August 24,
会议地点	Trieste, Italy
收录类别	EI
ISSN	2161-8070
ISBN	9781457717307
部门归属	(1) College of Information Science and Technology Beijing University of Chemical Technology Beijing 100029 China; (2) State Key Laboratory of Manufacturing Systems Engineering Xi'an Jiaotong University Xi'an 710054 China; (3) State Key Laboratory of Computer Science Institute of Software Chinese Academy of Sciences Beijing 100190 China
摘要	Scheduling in semiconductor manufacturing system is an important task for the industries faced with a large amount of resource competitions. Effective scheduling can improve the overall system performance and customer satisfaction. In this paper, a scheduling method with the core of bottleneck equipment control is designed referring to Drum-Buffer-Rope (DBR) theory. In order to identify the main-bottleneck, the relative load which takes the feature of reentrance into consideration is applied. For the avoidance of local blocking, the management of sub-bottleneck is presented. As both releasing and dispatching are taken into account, a scheduling method based on the compound priority is formed. Finally, HP-24 semiconductor wafer fabrication is used as an example to demonstrate the effectiveness of the proposed method. © 2011 IEEE.; Scheduling in semiconductor manufacturing system is an important task for the industries faced with a large amount of resource competitions. Effective scheduling can improve the overall system performance and customer satisfaction. In this paper, a scheduling method with the core of bottleneck equipment control is designed referring to Drum-Buffer-Rope (DBR) theory. In order to identify the main-bottleneck, the relative load which takes the feature of reentrance into consideration is applied. For the avoidance of local blocking, the management of sub-bottleneck is presented. As both releasing and dispatching are taken into account, a scheduling method based on the compound priority is formed. Finally, HP-24 semiconductor wafer fabrication is used as an example to demonstrate the effectiveness of the proposed method. © 2011 IEEE.
关键词	Customer Satisfaction Rope Scheduling Semiconductor Device Manufacture
主办者	Ansaldo Sistemi Industriali - Results to the Power of Three
语种	英语
内容类型	会议论文
URI标识	http://ir.iscas.ac.cn/handle/311060/16217
专题	中国科学院软件研究所
推荐引用方式 GB/T 7714	Cao Zhengcai,Peng Yazhen,Wang Yongji. a drum-buffer-rope based scheduling method for semiconductor manufacturing system[C],2011:120-125.