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| a drum-buffer-rope based scheduling method for semiconductor manufacturing system | |
| Cao Zhengcai; Peng Yazhen; Wang Yongji | |
| 2011 | |
| Conference Name | 2011 7th IEEE International Conference on Automation Science and Engineering, CASE 2011 |
| Source | IEEE International Conference on Automation Science and Engineering |
| Pages | 120-125 |
| Conference Date | August 24, |
| Conference Place | Trieste, Italy |
| Indexed Type | EI |
| ISSN | 2161-8070 |
| ISBN | 9781457717307 |
| Department | (1) College of Information Science and Technology Beijing University of Chemical Technology Beijing 100029 China; (2) State Key Laboratory of Manufacturing Systems Engineering Xi'an Jiaotong University Xi'an 710054 China; (3) State Key Laboratory of Computer Science Institute of Software Chinese Academy of Sciences Beijing 100190 China |
| English Abstract | Scheduling in semiconductor manufacturing system is an important task for the industries faced with a large amount of resource competitions. Effective scheduling can improve the overall system performance and customer satisfaction. In this paper, a scheduling method with the core of bottleneck equipment control is designed referring to Drum-Buffer-Rope (DBR) theory. In order to identify the main-bottleneck, the relative load which takes the feature of reentrance into consideration is applied. For the avoidance of local blocking, the management of sub-bottleneck is presented. As both releasing and dispatching are taken into account, a scheduling method based on the compound priority is formed. Finally, HP-24 semiconductor wafer fabrication is used as an example to demonstrate the effectiveness of the proposed method. © 2011 IEEE.; Scheduling in semiconductor manufacturing system is an important task for the industries faced with a large amount of resource competitions. Effective scheduling can improve the overall system performance and customer satisfaction. In this paper, a scheduling method with the core of bottleneck equipment control is designed referring to Drum-Buffer-Rope (DBR) theory. In order to identify the main-bottleneck, the relative load which takes the feature of reentrance into consideration is applied. For the avoidance of local blocking, the management of sub-bottleneck is presented. As both releasing and dispatching are taken into account, a scheduling method based on the compound priority is formed. Finally, HP-24 semiconductor wafer fabrication is used as an example to demonstrate the effectiveness of the proposed method. © 2011 IEEE. |
| Keyword | Customer Satisfaction Rope Scheduling Semiconductor Device Manufacture |
| Sponsorship | Ansaldo Sistemi Industriali - Results to the Power of Three |
| Language | 英语 |
| Content Type | 会议论文 |
| URI | http://ir.iscas.ac.cn/handle/311060/16217 |
| Collection | 中国科学院软件研究所 |
| Recommended Citation GB/T 7714 | Cao Zhengcai,Peng Yazhen,Wang Yongji. a drum-buffer-rope based scheduling method for semiconductor manufacturing system[C],2011:120-125. |
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