ANFIS and SA Based Approach to Prediction, Scheduling, and Performance Evaluation for Semiconductor Wafer Fabrication

ISCAS OpenIR

	ANFIS and SA Based Approach to Prediction, Scheduling, and Performance Evaluation for Semiconductor Wafer Fabrication
	Cao Zhengcai; Zhao Huidan; Wang Yongji
	2013
发表期刊	CHINESE JOURNAL OF ELECTRONICS
ISSN	1022-4653
卷号	22 期号:1 页码:25-30
摘要	In this paper, an optimized mechanism for Semiconductor wafer fabrication (SWF) by integrating the Adaptive neuro-fuzzy inference system (ANFIS) with Simulated annealing (SA) algorithm is proposed. In this approach, aiming to solve the rush order problem which significantly affect the cycle time and impact the Work in process (WIP) of lots due to the high priority, we build an ANFIS based prediction model which will be embedded into releasing to forecast product codes and quantities of the contingent rush orders. Then a scheduler based on SA algorithm is constructed, the coding of which represents a combination of scheduling policies, including lot releasing policies, dispatching rules, batching rules and setting-up rules. When the SA finished its optimization process, an optimal scheduling policy is produced. By using the proposed approach, we will find that the system can be optimized to a large extent and give a better performance.; In this paper, an optimized mechanism for Semiconductor wafer fabrication (SWF) by integrating the Adaptive neuro-fuzzy inference system (ANFIS) with Simulated annealing (SA) algorithm is proposed. In this approach, aiming to solve the rush order problem which significantly affect the cycle time and impact the Work in process (WIP) of lots due to the high priority, we build an ANFIS based prediction model which will be embedded into releasing to forecast product codes and quantities of the contingent rush orders. Then a scheduler based on SA algorithm is constructed, the coding of which represents a combination of scheduling policies, including lot releasing policies, dispatching rules, batching rules and setting-up rules. When the SA finished its optimization process, an optimal scheduling policy is produced. By using the proposed approach, we will find that the system can be optimized to a large extent and give a better performance.
收录类别	SCI
关键词	Semiconductor Manufacturing System Scheduling Adaptive Neuro-fuzzy Inference System Simulated Annealing Algorithm
部门归属	[Cao Zhengcai; Zhao Huidan] Beijing Univ Chem Technol, Coll Informat Sci & Technol, Beijing 100029, Peoples R China. [Cao Zhengcai] Xi An Jiao Tong Univ, State Key Lab Mfg Syst Engn, Xian 710054, Peoples R China. [Wang Yongji] Chinese Acad Sci, Inst Software, State Key Lab Comp Sci, Beijing 100190, Peoples R China.
语种	英语
WOS记录号	WOS:000317701800005
引用统计
内容类型	期刊论文
URI标识	http://ir.iscas.ac.cn/handle/311060/16957
专题	中国科学院软件研究所
推荐引用方式 GB/T 7714	Cao Zhengcai,Zhao Huidan,Wang Yongji. ANFIS and SA Based Approach to Prediction, Scheduling, and Performance Evaluation for Semiconductor Wafer Fabrication[J]. CHINESE JOURNAL OF ELECTRONICS,2013,22(1):25-30.
APA	Cao Zhengcai,Zhao Huidan,&Wang Yongji.(2013).ANFIS and SA Based Approach to Prediction, Scheduling, and Performance Evaluation for Semiconductor Wafer Fabrication.CHINESE JOURNAL OF ELECTRONICS,22(1),25-30.
MLA	Cao Zhengcai,et al."ANFIS and SA Based Approach to Prediction, Scheduling, and Performance Evaluation for Semiconductor Wafer Fabrication".CHINESE JOURNAL OF ELECTRONICS 22.1(2013):25-30.